Onto Innovation Capital Expenditure — Historical Data
Onto Innovation (ONTO) capital expenditure was $29M in FY2026 (-11% YoY). The tables below show the complete quarterly and annual capital expenditure history, sourced from SEC EDGAR 10-K and 10-Q filings.
Annual Capital Expenditure
Fiscal Year
Capital Expenditure
YoY
2026
$29M
-11%
2024
$32M
+41%
2023
$23M
+23%
2022
$18M
+381%
2020
$4M
-44%
2019
$7M
-10%
2018
$8M
-33%
2017
$11M
+180%
2016
$4M
+117%
2015
$2M
-68%
2014
$6M
+2%
2013
$6M
+14%
2012
$5M
+81%
2011
$3M
+235%
2010
$822,000
Recent Quarterly Capital Expenditure
Quarter
Capital Expenditure
Q2 2026
$4M
Q1 2026
$4M
Q3 2025
$1M
Q2 2025
$14M
Q1 2025
$8M
Q4 2024
$5M
Q3 2024
$8M
Q2 2024
$12M
Q1 2024
$7M
Q4 2023
$2M
Q3 2023
$8M
Q2 2023
$5M
Source: ONTO on EDGAR. Data from SEC EDGAR 10-K and 10-Q filings. Updated quarterly.